Mechanical Specifications - Profilm3D
- Z Range: 100mm
- Piezo Range: 500µm
- XY Stage Type: Automated
- XY Stage Range: 100mm x 100mm
- Camera: 2592 x 1944 (5 megapixels)
- System Size, W x D x H: 305mm x 305mm x 505mm
- System Weight: 15kg
Performance Spcifications
- Thickness Range, WLI: 50nm - 10mm
- Thickness Range, PSI: 0 - 3µm
- Sample Reflectance Range: 0.5% - 100%