Mechanical Specifications - Profilm3D

• Z Range: 100mm
• Piezo Range: 500µm
• XY Stage Type: Automated
• XY Stage Range: 100mm x 100mm
• Camera: 2592 x 1944 (5 megapixels)
• System Size, W x D x H: 305mm x 305mm x 505mm
• System Weight: 15kg

Performance Spcifications

• Thickness Range, WLI: 50nm - 10mm
• Thickness Range, PSI: 0 - 3µm
• Sample Reflectance Range: 0.5% - 100%

Operation Manual for Filmetrics Profilm 3D