Sputter Coater Cressington 108 AUTO | Department of Physics

Sputter Coater Cressington 108 AUTO

Sputter Coater | Cressington 108 AUTO

Sputter Coater Cressington 108 Auto

Specifications:

  • Sputter head:

    • Low voltage planar magnetron

    • Wrap-around dark-space shield

  • Sputter target: Gold 57mm Ø x 0.1mm thick

  • Sputter supply:

    • Microprocessor based

    • Safety interlocked

    • Current control independent of vacuum

    • Digitally selectable current (10, 20, 30 or 40mA)

  • Sample table:

    • Holds 12 SEM ½" stubs

    • Height adjustment through 60mm

  • Thickness monitoring: MTM-10

  • Rotary pump: High speed, direct drive 2-stage

OPERATION MANUAL